Direct liquid injection MOCVD growth of TiO2films using the precursor Ti(mpd)(dmae)2
| Item Type | Conference Proceedin |
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| Language | English |
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| Author |
Ido Shinji
井土 愼二 |
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| Journal or Publication Title | Direct liquid injection MOCVD growth of TiO2films using the precursor Ti(mpd)(dmae)2 |
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| Year | 2001 |
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