Effects of annealing temperatures on the morphological, mechanical, surface chemical bonding, and solar selectivity properties of sputtered TiAlSiN thin films

Item Type
Language	English
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Author	Ido Shinji 井土 愼二
Abstract
Journal or Publication Title	Effects of annealing temperatures on the morphological, mechanical, surface chemical bonding, and solar selectivity properties of sputtered TiAlSiN thin films
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Year	2016
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