Spectral selectivity of unbalanced magnetron sputtered TiN, TiAlN and TiAlSiN coatings: XRD, SEM and optical analyses
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| Language | English |
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Ido Shinji
井土 愼二 |
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| Journal or Publication Title | Spectral selectivity of unbalanced magnetron sputtered TiN, TiAlN and TiAlSiN coatings: XRD, SEM and optical analyses |
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| Year | 2014 |
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