Electrical Characterization of Postmetal Annealed Ultrathin TiN Gate Electrodes in Si MOS Capacitors
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| Language | English |
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Ido Shinji
井土 愼二 |
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| Journal or Publication Title | Electrical Characterization of Postmetal Annealed Ultrathin TiN Gate Electrodes in Si MOS Capacitors |
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| Year | 2016 |
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