Fundamental studies of chemical vapour deposition processes. Far-IR synchrotron studies of the adsorption of tin oxide precursors on tin oxide and direct liquid injection CVD …

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Language English
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Author Ido Shinji
井土 愼二
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Journal or Publication Title Fundamental studies of chemical vapour deposition processes. Far-IR synchrotron studies of the adsorption of tin oxide precursors on tin oxide and direct liquid injection CVD …
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Year 2003
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