Fundamental studies of chemical vapour deposition processes: Far-IR synchrotron studies of the adsorption of tim oxide precursors on tin oxide and direct liquid injection CVD growth of titania thin films on silicon

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Language	English
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Author	Ido Shinji 井土 愼二
Abstract
Journal or Publication Title	Fundamental studies of chemical vapour deposition processes: Far-IR synchrotron studies of the adsorption of tim oxide precursors on tin oxide and direct liquid injection CVD growth of titania thin films on silicon
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Year	2003
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