MOCVD-Precursors-Direct liquid injection MOCVD growth of TiO2 films using the precursor Ti (mpd)(dmae) 2
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| Language | English |
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Ido Shinji
井土 愼二 |
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| Journal or Publication Title | MOCVD-Precursors-Direct liquid injection MOCVD growth of TiO2 films using the precursor Ti (mpd)(dmae) 2 |
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| Year | 2001 |
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